Motioning Equipment for Electron Column
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United States of America Patent
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N/A
Issued Date -
Sep 4, 2008
app pub date -
Sep 1, 2005
filing date -
Sep 1, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Provided is motioning equipment which provides relative motion between electron column emitting electron beam and a sample on which the electron beam is irradiated. The motioning equipment includes multi-microcolumn for emitting electron beams on the sample, supports for supporting the multi-microcolumns, and driving means for driving the supports to move the multi-microcolumns.
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