Femtosecond Laser Micromachining Device with Dynamic Bean Conformation
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United States of America Patent
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Issued Date -
Sep 4, 2008
app pub date -
Apr 19, 2006
filing date -
Apr 20, 2005
priority date (Note) -
Abandoned
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Abstract
The device comprises a laser-type coherent light radiation source transmitting ultrashort pulses, a dynamic beam shaping arrangement and an arrangement for using and processing a laser beam. The dynamic beam shaping arrangement comprises an optical system including a part for actively modifying the laser beam wavefront and a detecting part, excepting a phase meter, used for three-dimensionally shaping the beam. These parts are connected by a feed-back circuit and the active modifying part comprises a first fixed or active component and a second active component.
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