OPTICAL IMAGE MEASUREMENT DEVICE
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United States of America Patent
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Issued Date -
Aug 28, 2008
app pub date -
Feb 21, 2008
filing date -
Feb 23, 2007
priority date (Note) -
Abandoned
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Abstract
An optical image measurement device comprises: a controller configured to control the scanner to scan the target position along a plurality of radially-arranged scanning lines; and an image forming part configured to form a tomographic image on each of the plurality of scanning lines based on the result detected by the detector, and form a 3-dimensional image of the measurement object based on the plurality of tomographic images having been formed.
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