End Effector For Handling Sputter Targets

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20080203641A1
SERIAL NO

11795560

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A fixture and method is provided for gripping an article, such as a sputtering target. The fixture comprises a base, a first set of contact rollers, and a second set of contact rollers, wherein at least one of the first set and the second set are adjustably positioned relative to the other of the first set and the second set on the base. The contact rollers can be configured as v-grooved wheels that will only touch chamfered portions of an outer diameter of the sputtering target when the contact rollers are clamped against the sputtering target. At least one of the first set and the second set of contact rollers can be pivotally mounted on a slide, with the slide being adjustably positioned on the base of the fixture.

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Patent Owner(s)

Patent OwnerAddress
TOSOH SMD INC3600 GANTZ ROAD GROVE CITY OH 43123

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bultz, Neil D Greenville, SC 6 80
Cosper, Bobby R Trenton, GA 5 53
Nozicka, David M Wellsburg, IA 1 2
Reed, Wiley Zane Greenville, SC 4 44
Schmidt, Kenneth G Piedmont, SC 4 44

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