Method and device for transferring a pattern from a stamp to a substrate
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United States of America Patent
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May 1, 2012
Grant Date -
Aug 28, 2008
app pub date -
May 1, 2006
filing date -
May 3, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A device (1) for transferring a pattern (12) from a stamp (10) to a substrate (20) comprises a table (22) for supporting a substrate (20), a flexible stamp (10) and a movably arranged body (25) having a pressure chamber (27) for exerting pressure on a portion of the stamp (10), so that the portion is pushed toward the substrate (20) and contacts the substrate (20). During a pattern transferring process, the body (25) is moved. As a result, adjacent portions of the stamp (10) successively go through a process of being pushed toward the substrate (20), getting in contact with the substrate (20), and being allowed to move back in place again. In this way, it is achieved that the pattern (12) of the stamp (10) is transferred to the substrate (20), without the introduction of vibrations, so that the transfer of the pattern (12) takes place in a highly accurate fashion.
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