Importance

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Abstract

In operation of a rough and fine movement mechanism (1) of a linear drive type, a fine movement mechanism (3), on which an objective workpiece to be positioned (8) is mounted, is transferred toward a target point at a high speed by a rough movement mechanism (2) and roughly positioned around the target point. Subsequently, the objective workpiece (8) is transferred in a narrow stroke range by the fine movement mechanism (3) and accurately positioned at the target point. The objective workpiece (8) is transferred with a high acceleration by the rough movement mechanism (2) under a condition where the fine movement mechanism (3) is mechanically connected to the rough movement mechanism (2) by a braking mechanism 9. As a result, when the rough movement mechanism (2) is accelerated, no load acts on the fine movement mechanism (3) or such a load can be decreased. Consequently, a rough and fine movement mechanism, which enables both high-speed positioning by the rough movement mechanism and high-accuracy positioning by the fine movement mechanism consistently, can be realized.

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First Claim