Test gas leak detection using a composite membrane
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United States of America Patent
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Issued Date -
Aug 28, 2008
app pub date -
Feb 28, 2007
filing date -
Feb 28, 2007
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Abandoned
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Abstract
A leak detector includes a leak detector inlet to receive a test gas; a vacuum pump coupled to the leak detector inlet; a test gas sensing unit connected through a passage to the leak detector inlet; and a membrane that is permeable to the test gas disposed in the passage between the leak detector inlet and the test gas sensing unit, the membrane having a permeance to the test gas that varies by less than five percent over a temperature range of T.sub.0-20 K to T.sub.0+20 K, where T.sub.0 is a design temperature. In addition, methods are provided for making a composite membrane that includes a semi-permeable membrane and a porous membrane. Furthermore, a reference leak, which includes a composite membrane is provided.
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