Carrier film for mounting polishing workpiece and method for making the same
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United States of America Patent
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Issued Date -
Aug 21, 2008
app pub date -
Feb 15, 2007
filing date -
Feb 15, 2007
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a carrier film for mounting a polishing workpiece. The carrier film comprises a surface substrate and a buffer substrate. The surface substrate comprises holes, and the material of the surface substrate comprises elastomer. The buffer substrate comprises holes, and the material of the buffer substrate comprises the elastomer. The surface substrate and the buffer substrate are adhered with adhesive comprising the elastomer. A method for making the carrier film is also provided. When polishing, the carrier film provides a good buffer property to conduct and release down force applied on the polishing workpiece.
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