Method for glass sheet semiconductor coating
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United States of America Patent
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May 10, 2016
Issued Date -
N/A
app pub date -
Jan 28, 2008
filing date -
Feb 1, 2007
priority date (Note) -
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Abstract
A system (20) and method for coating semiconductor material on glass sheets is performed by conveying the glass sheets vertically suspended at upper extremities thereof through a system (20) having a housing (22) including a vacuum chamber (24). The glass sheets are conveyed on shuttles (42) through an entry load lock station (26) into the housing vacuum chamber (24), through a heating station (30) and at least one deposition station (32, 34) in the housing (22), and to a cooling station 36 prior to exiting of the system through an exit load lock station (28). The resultant semiconductor coated glass sheet (G) has tong marks (44′) formed during the coating processing.
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