Microfeature workpiece transfer devices with rotational orientation sensors, and associated systems and methods
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jul 31, 2008
app pub date -
Jan 29, 2007
filing date -
Jan 29, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Microfeature workpiece transfer devices with rotational orientation sensors, and associated systems and methods are disclosed. A transfer device in accordance with one embodiment includes a base unit movable along a guidepath, and a carrier movable relative to the base unit. The device further includes a position sensor located to identify a rotational orientation of the workpiece while the workpiece is carried by the carrier (e.g., by one or more edge grippers or other end-effector devices). In particular embodiments, the rotational orientation of the workpiece is corrected by appropriately moving articulatable links of the transfer device, and/or by rotating a support that carries the workpiece for processing at a process chamber.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully