GLASS COMPOSITIONS USEFUL FOR RIE STRUCTURING

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United States of America Patent

APP PUB NO 20080179294A1
SERIAL NO

12017780

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A glass composition suitable for reactive ion etching.

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Patent Owner(s)

Patent OwnerAddress
SCHOTT CORPORATION555 TAXTER ROAD ELMSFORD NY 10523

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dahlmann, Ulf Gau-Odernheim, DE 22 162
Fotheringham, Ulrich Wiesbaden, DE 33 185
HAYDEN, Joseph S Clarks Summit, PA 36 391
Pannhorst, Wolfgang Mainz, DE 8 158
Pucilowski, Sally Luzerne, PA 21 218

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