Gas Bearing Spindles

United States of America Patent

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Issued Date
Jul 31, 2008
app pub date
Apr 11, 2006
filing date
Apr 15, 2005

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Abandoned

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Abstract

A gas bearing spindle (2) for use in processing apparatus (1), for example ion implantation apparatus. The spindle (2) has a steel bearing surface (23) and a shaft (3) coated with chrome (3a) or another hard material.

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Patent Owner(s)

Patent Owner	Address
GSI GROUP LTD	COSFORD LANE SWIFT VALLEY RUGBY WARWICKSHIRE CV21 1QN

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Pavey, Christopher John	Dorset, GB	2	3

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Gas Bearing Spindles

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11911444

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APP PUB NO	20080178795A1
SERIAL NO	11911444
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11911444

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