Protected magnets and magnet shielding for processing microfeature workpieces, and associated systems and methods
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United States of America Patent
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Issued Date -
Jul 31, 2008
app pub date -
Jan 29, 2007
filing date -
Jan 29, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Protected magnets and magnet shielding for processing microfeature workpieces, and associated systems and methods are disclosed. A tool in accordance with one embodiment includes a process chamber having a process location for processing microfeature workpieces, a support positioned to carry a microfeature workpiece at the process location, a transfer device movable relative to the support to move the microfeature workpieces to and from the support, and a magnet positioned adjacent to the process chamber to magnetically orient materials applied to the microfeature workpieces. The tool can include other features, including an enclosure positioned around the magnet to chemically isolate the magnet from chemicals delivered to and carried in the process chamber, a shield positioned between the magnet and the motion path of the transfer device, magnetically conductive return paths positioned proximate to the magnet, and/or shields positioned around the motors carried by the tool.
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