Indium tin oxide target, method of manufacturing the same and transparent electrode manufactured by using the same
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United States of America Patent
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Issued Date -
Jul 24, 2008
app pub date -
Mar 19, 2007
filing date -
Jan 22, 2007
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Abandoned
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Abstract
An indium tin oxide (ITO) target including calcium of about 0.001% to about 10% by atom, compared with an indium atom, and an ITO transparent electrode for a display apparatus manufactured from an ITO target are provided. A method of manufacturing the ITO target, the method including: preparing a slurry by mixing an indium oxide powder, a tin oxide powder, and a calcium-containing compound powder; granulating the slurry by milling and drying the slurry to prepare a granulated powder; shaping the granulated powder to form a shaped body; and sintering the shaped body. The ITO target including calcium manufactured by the method can reduce a number of times nodules and arcs are generated during sputtering, thereby growing a film which is able to be used for a long period of time.
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