PIEZOELECTRIC THIN-FILM RESONATOR, ACOUSTIC WAVE DEVICE AND METHOD FOR FABRICATING THE ACOUSTIC WAVE DEVICE
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United States of America Patent
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Issued Date -
Jul 17, 2008
app pub date -
Jan 10, 2008
filing date -
Jan 11, 2007
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Abandoned
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Abstract
A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film provided on the lower electrode; an upper electrode provided on the piezoelectric film so as to face the lower electrode across the piezoelectric film to thus define a resonance portion; and a weight load film provided on the upper electrode, the weight load film being provided in the resonance portion and having an area smaller than that of the resonance portion.
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