Device and method for testing semiconductor element, and manufacturing method thereof
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United States of America Patent
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Issued Date -
Jun 26, 2008
app pub date -
Dec 26, 2007
filing date -
Dec 22, 2006
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Abandoned
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Abstract
A device and a method for testing a semiconductor element, and manufacturing method thereof are provided. The apparatus includes a substrate and a conductive macromolecular elastic structure. The conductive macromolecular elastic structure is disposed on the substrate and defines a receiving space for receiving a conductive bump of the semiconductor element in order to test the semiconductor element.
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