DISCHARGE CELL FOR OZONIZER
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United States of America Patent
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Issued Date -
Jun 5, 2008
app pub date -
Nov 28, 2007
filing date -
Nov 30, 2006
priority date (Note) -
Abandoned
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Abstract
Decrease in the ozone concentration that becomes a problem when high purity oxygen is used as a raw material gas is prevented. A high purity alumina substrate having a high screen degree is used as a dielectric. A catalytic substance to hinder the decrease of the ozone concentration is fixed on the surface of the alumina substrate as the dielectric by a baking fixing agent. The baking fixing agent is a glass that becomes a paste form that is capable of powder kneading the catalytic substance and attaching to the surface of the dielectric, fixes the catalytic substance on the surface of the dielectric by hardening by baking, and shows ozone resistance and sputtering resistance under the production of ozone in the discharge gap, and forms a functional film containing a large amount of the catalytic substance and is stable on the surface of the dielectric.
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