Metal Thin Film-Forming Method And Metal Thin Film

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United States of America Patent

APP PUB NO 20080124238A1
SERIAL NO

11792365

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Abstract

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A metal thin film-forming method which comprises the step of firing metal nanoparticles each comprising a particle consisting of at least one metal selected from Ag, Au, Ni, Pd, Rh, Ru, and Pt or an alloy comprising at least two of these metals and an organic substance adhered to the periphery thereof as a dispersant, under a gas atmosphere containing water and/or an organic acid to thus form a metal thin film. This metal thin film possesses a low resistance value.

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Patent Owner(s)

Patent OwnerAddress
ULVAC INCKANAGAWA JAPAN KANAGAWA
JEMCO INC1-6 BARAJIMA 3-CHOME AKITA-SHI AKITA-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Atsuki, Tsutomu Chiba-ken, JP 13 164
Oda, Masaaki Chiba-ken, JP 29 444
Tei, Kyuukou Chiba-ken, JP 1 5

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