Measuring water vapor in high purity gases
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United States of America Patent
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Issued Date -
May 29, 2008
app pub date -
Jun 14, 2007
filing date -
Jun 15, 2006
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Abandoned
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Abstract
Low concentrations of water vapor in a gas stream can be detected and quantified using absorption spectroscopy in the infrared spectral region. Absorption spectra can recorded using tunable diode lasers as the light source. Modulation of the laser signal and demodulation of the resultant detector response yields dependable measurements that may be conducted with very little maintenance in demanding environments.
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