Method and apparatus for automation of PTF measurement in sputter targets
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United States of America Patent
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Issued Date -
May 22, 2008
app pub date -
Nov 20, 2006
filing date -
Nov 20, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention is directed towards an automated apparatus and method for determining the pass through flux (PTF) of a sputter target by generating a magnetic field on a first side of the sputter target and passing the magnetic field through the sputter target and out a second side of the sputter target, measuring the magnetic field at the second side of the sputter target with a magnetic field detector, and moving one or both the sputter target or the magnetic field detector during the measuring using an automated stand. In various embodiments of the present invention, the automated apparatus and method may generate a map of the sputter target.
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