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Abstract

A method embodiment of the present method and apparatus may comprise: transforming raw data into flattened data; taking a first derivative of the flattened data to produce derivate data; and applying a Fourier transform to the derivate data to produce transformed data. A system embodiment of the present method and apparatus may have: a recorder module for recording raw x-ray scatter data associated with a thickness of at least one film layer on a substrate; a transform module for transforming the raw x-ray scatter data into flattened data that is a sloping set of data, the transform module operatively coupled to the recorder module; a derivative module for applying a derivative to level off the sloping set of data to produce derivate data, the derivative module operatively coupled to the transform module; a Fourier module for applying a Fourier transform to the derivate data to produce transformed data, the Fourier module operatively coupled to the derivative module; and a display module for displaying the transformed data as a plot of intensity versus thickness of the at least one film layer, the display module operatively coupled to the Fourier module. The raw x-ray scatter data may be converted to converted raw x-ray scatter data with a predetermined conversion function. The raw x-ray scatter data may be in the form of intensity as a function of angle, and the converted raw x-ray scatter data being in the form of intensity as a function of reciprocal space coordinate.

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First Claim