Planar etching of dissimilar materials
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
May 15, 2008
app pub date -
Jun 28, 2007
filing date -
Nov 11, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of planar etching of dissimilar materials with a Focused Ion Beam (FIB) system such as the OptiFIB manufactured by Credence Systems. The method includes adjusting the selectivity between the two materials, which varies when the ratio of the assisting chemistry pressure to the ion dose rate changes. This method can be used in such applications as FIB circuit edit, failure analysis, and cross sectioning.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
DCG SYSTEMS INC | 45900 NORTHPORT LOOP EAST FREMONT CA 94538 |
International Classification(s)

- 2007 Application Filing Year
- H01L Class
- 14819 Applications Filed
- 10455 Patents Issued To-Date
- 70.56 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Jain, Rajesh | San Jose, CA | 78 | 859 |
# of filed Patents : 78 Total Citations : 859 | |||
Makarov, Vladimir | Fremont, CA | 47 | 483 |
# of filed Patents : 47 Total Citations : 483 | |||
Malik, Tahir | Fremont, CA | 4 | 35 |
# of filed Patents : 4 Total Citations : 35 |
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Patent Citation Ranking
- 6 Citation Count
- H01L Class
- 1.99 % this patent is cited more than
- 17 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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