MEMS filter module with multi-level filter traps
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United States of America Patent
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Issued Date -
May 8, 2008
app pub date -
Nov 17, 2005
filing date -
Aug 24, 2005
priority date (Note) -
Abandoned
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Abstract
A MEMS flow module (340) includes a plurality of filtering sections (344). Each filtering section (344) is defined by a stack (342) of a plurality of layers (346, 348, 350, 352). Each filtering section (344) includes at least one filter trap (364, 368) at each of at least two different levels or elevations within the stack (342). This provides for an increased flow rate through the MEMS flow module (340).
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