Method and apparatus for fabricating nanostructure multi-element compound

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United States of America Patent

APP PUB NO 20080107826A1
SERIAL NO

11299930

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A method and an apparatus for fabricating a multi-element compound nanostructure are provided. The method includes steps of providing a substrate in a chamber, providing a particle-beam having plural first particles, providing a particle source having plural second particles to fill the chamber therewith and focusing the particle-beam on the substrate and depositing the first particles with the second particles on the substrate to form the multi-element compound nanostructure. In comparison with the conventional ones, the provided method is more simplified and has a great potentiality for being applied.

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Patent Owner(s)

Patent OwnerAddress
INSTRUMENT TECHNOLOGY RESEARCH CENTER20 R&D ROAD VI HSINCHU SCIENCE PARK HSINCHU 300 R O C

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jyh Shin Hsinchu City, TW 6 83
Chen, Sheng-Yuan Hsin-Chu City, TW 15 85
Cheng, Shao-Chang Yonghe City, TW 2 2
Chou, Hsiao-yu Hsin-Chu City, TW 10 54
Hu, Yi-Chiuen Baoshan Township, TW 10 129

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