Method and apparatus for dividing brittle material
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United States of America Patent
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app pub date -
Oct 23, 2007
filing date -
Nov 2, 2006
priority date (Note) -
Abandoned
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Abstract
A minute groove M1 is formed from one end 101a of a division-planned line 101 to the other end 101b thereof by use of a cutter 14A by moving a first working head A, and while the groove M is being irradiated with laser beam L, inspection is performed by use of an inspection device 15 to check whether or not a crack has propagated from the groove M1 and division has been performed. Storage means 13A stores the position of an undivided portion on the basis of a detection signal of this inspection device 15. Thereafter, after the backward movement of the first working head 7A, the undivided portion is again irradiated with laser beam L, with the above-described cutter 14A supported above, whereby the undivided portion is completely divided. Material glass 2 can be divided exactly according to the division-planned line 101 without forming a groove M double in the division-planned line 101.
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