SEMICONDUCTOR ARRAY AND METHOD FOR MANUFACTURING A SEMICONDUCTOR ARRAY
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United States of America Patent
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Issued Date -
May 1, 2008
app pub date -
Nov 1, 2007
filing date -
Nov 1, 2006
priority date (Note) -
Abandoned
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Abstract
a semiconductor Array and method for Manufacturing a semiconductor array is provided that includes a substrate, an element layer of a single-crystal semiconductor material, an isolation layer that is formed between the substrate and the element layer and isolates the element layer from the substrate, a number of elements that are formed in the element layer, a trench structure that is adjacent to the isolation layer and that is filled with a filling, to isolate at least one element of the number of elements within the element layer in a lateral direction, whereby the filling has a dielectric, and a self-supporting microstructure that is formed in a structure region defined by the trench structure.
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