Nanoimprint Mold, Method of Forming a Nonopattern, and a Resin-Molded Product
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United States of America Patent
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Issued Date -
Apr 17, 2008
app pub date -
Sep 8, 2005
filing date -
Sep 9, 2004
priority date (Note) -
Abandoned
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Abstract
Releasability of a mold and a resin layer during nanoimprinting is improved, thereby improving the durability of the mold. A nanoimprint mold for resin molding comprising a carbon nanowall layer provided on the surface thereof, a method of forming a nanopattern using the mold, and a resin-molded product obtained by the method.
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