Importance

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Abstract

Apparatus for generating a homogeneous angular distribution of laser irradiation (17), the said apparatus comprising a first homogenization stage (10) with a first substrate (1), which includes an entrance face and exit face, wherein a first lens array (4) is disposed on the entrance face and/or on the exit face, through which first lens array the laser irradiation (17) to be homogenized can pass, as well as a second homogenization stage (11) with a second substrate (2), which includes an entrance face and an exit face, wherein a second lens array (5) is disposed on the entrance face and/or on the exit face, through which second lens array the laser irradiation (17) emitted from the first lens array (4) can pass, wherein the laser irradiation (17), after exiting from the second homogenization stage, has a comparably homogeneous angular distribution, wherein the second homogenization stage (11) in addition to the second substrate (2) has a third substrate (3), which includes an entrance face and an exit face, wherein a third lens array (6) is disposed on the entrance face and/or on the exit face, the said third lens array being at a spacing from the second lens array (5), wherein the distance (d.sub.1, d.sub.2) between the second and the third substrate influences the angular distribution.

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First Claim