Generation of Monochromatic and Collimated X-Ray Beams

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United States of America Patent

APP PUB NO 20080075229A1
SERIAL NO

11862537

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Abstract

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A compact x-ray source includes an electron beam source with a metallic film on a diamond window. The metallic film, which may be copper or scandium, absorbs the electron beams and produces k-alpha x-rays. The diamond window is a single crystal of diamond with a crystallographic orientation to diffract the x-rays, thereby producing a monochromatic and well collimated x-ray beam. The orientation of the crystal lattice may be configured to produce multiple x-ray beams. A plurality of electron beam sources may also be used to generate multiple x-ray beams. A detector is used to receive the x-ray beam after it interacts with a sample to be measured.

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NANOMETRICS INCORPORATED1550 BUCKEYE DRIVE MILPITAS CA 95035

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  • 2007 Application Filing Year
  • H01J Class
  • 2391 Applications Filed
  • 1245 Patents Issued To-Date
  • 52.08 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances200720082009201020112012201320142015201620172018201920200255075100

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Inventor Name Address # of filed Patents Total Citations
Ryan, Thomas W Bend, OR 6 664

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  • 4 Citation Count
  • H01J Class
  • 4.74 % this patent is cited more than
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges47546202843723228458601 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0255075100125150175200225250275300325350375400425450475500525550575

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