Generation of Monochromatic and Collimated X-Ray Beams
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United States of America Patent
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N/A
Issued Date -
Mar 27, 2008
app pub date -
Sep 27, 2007
filing date -
Sep 27, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A compact x-ray source includes an electron beam source with a metallic film on a diamond window. The metallic film, which may be copper or scandium, absorbs the electron beams and produces k-alpha x-rays. The diamond window is a single crystal of diamond with a crystallographic orientation to diffract the x-rays, thereby producing a monochromatic and well collimated x-ray beam. The orientation of the crystal lattice may be configured to produce multiple x-ray beams. A plurality of electron beam sources may also be used to generate multiple x-ray beams. A detector is used to receive the x-ray beam after it interacts with a sample to be measured.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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NANOMETRICS INCORPORATED | 1550 BUCKEYE DRIVE MILPITAS CA 95035 |
International Classification(s)

- 2007 Application Filing Year
- H01J Class
- 2391 Applications Filed
- 1245 Patents Issued To-Date
- 52.08 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Ryan, Thomas W | Bend, OR | 6 | 664 |
# of filed Patents : 6 Total Citations : 664 |
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Patent Citation Ranking
- 4 Citation Count
- H01J Class
- 4.74 % this patent is cited more than
- 17 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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