System and method for the improvement of optical transmission efficiency in laser systems
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United States of America Patent
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Issued Date -
Mar 27, 2008
app pub date -
Sep 25, 2006
filing date -
Sep 25, 2006
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Abandoned
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Abstract
Embodiments of the present invention provide a system and method for improving the optical transmission efficiency of laser systems and increasing the lifetime of laser system components. An embodiment of the present invention can include creating spent excimer laser gas in a laser cavity and directing the spent excimer laser gas to a volume at least partially in the optical path of a laser beam.
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