Internal member for plasma-treating vessel and method of producing the same

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United States of America Patent

SERIAL NO

11882463

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Abstract

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It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al.sub.2O.sub.3 film formed on the undercoat as a middle layer and Y.sub.2O.sub.3 sprayed coating formed on the middle layer as a top coat.

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Patent Owner(s)

Patent OwnerAddress
TOCALO CO LTDKOBE-SHI HYOGO 650-0047

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harada, Yoshio Hyogo, JP 58 2357
Mitsuhashi, Kouji Yamanashi, JP 38 1111
Nagayama, Nobuyuki Yamanashi, JP 57 1551
Takeuchi, Junichi Hyogo, JP 109 1295

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  • 7 Citation Count
  • B05D Class
  • 5.51 % this patent is cited more than
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges454601577930221161501 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7081 - 90100 +0255075100125150175200225250275300325350375400425450475500

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