Internal member for plasma-treating vessel and method of producing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Aug 1, 2007
filing date -
Dec 10, 1999
priority date (Note) -
Abandoned
status (Latency Note)
![]() |
A preliminary load of PAIR data current through [] has been loaded. Any more recent PAIR data will be loaded within twenty-four hours. |
PAIR data current through []
A preliminary load of cached data will be loaded soon.
Any more recent PAIR data will be loaded within twenty-four hours.
![]() |
Next PAIR Update Scheduled on [ ] |

Importance

US Family Size
|
Non-US Coverage
|
Abstract
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al.sub.2O.sub.3 film formed on the undercoat as a middle layer and Y.sub.2O.sub.3 sprayed coating formed on the middle layer as a top coat.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TOCALO CO LTD | KOBE-SHI HYOGO 650-0047 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Harada, Yoshio | Hyogo, JP | 58 | 2357 |
# of filed Patents : 58 Total Citations : 2357 | |||
Mitsuhashi, Kouji | Yamanashi, JP | 38 | 1111 |
# of filed Patents : 38 Total Citations : 1111 | |||
Nagayama, Nobuyuki | Yamanashi, JP | 57 | 1551 |
# of filed Patents : 57 Total Citations : 1551 | |||
Takeuchi, Junichi | Hyogo, JP | 109 | 1295 |
# of filed Patents : 109 Total Citations : 1295 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 7 Citation Count
- B05D Class
- 5.51 % this patent is cited more than
- 17 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
- No Legal Status data available.

Matter Detail

Renewals Detail
