STABILIZER FOR ACIDIC, METAL-CONTAINING POLISHING BATHS
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United States of America Patent
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Issued Date -
Mar 20, 2008
app pub date -
Sep 19, 2007
filing date -
Sep 19, 2006
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Abandoned
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Abstract
The present invention relates to the use of a mixture of urea and one or more alkane-diphosphonic acids, optionally substituted with one or more hydroxyl or amino groups, or salts thereof for the stabilization of an acidic, metal- and peroxide-containing polishing solution. The invention also relates to peroxide-containing solutions that are suitable for the stabilization of acidic, metal- and peroxide-containing polishing baths, and acidic, peroxide-containing polishing solutions that contain the stabilizer mixture according to the invention. A method of chemical polishing of metal surfaces using the stabilizer according to the invention is also described.
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