CONFORMAL COATINGS FOR MICRO-OPTICAL ELEMENTS
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United States of America Patent
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app pub date -
Nov 8, 2007
filing date -
Mar 31, 2003
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Abandoned
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Abstract
A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure having a surface with uneven structures is exposed to one or more precursor vapors to create a self-limiting film growth on the surface of the optical structure. The film thickness may be increased and controlled by subsequent exposures. The resulting film conforms to surface structures having varying complex dimensions.
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