Resin Layer Forming Method And Apparatus For The Same
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United States of America Patent
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Issued Date -
Mar 6, 2008
app pub date -
Sep 14, 2004
filing date -
Sep 14, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
With respect to a liquid material such as an adhesive supplied at an inside portion between substrates, or the liquid material supplied to the inside portion on a substrate, a step of extending by rotation at a high speed and a step of rotating at a low speed are repeatedly and alternately conducted, and radiation of light is continuously or intermittently moved in order to gradually semi-cure or cure the liquid material in a radial direction from inside to outside. Therefore, the thickness of a resin layer made from the liquid material is gradually fixed in a radial direction from inside to outside.
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