Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device
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United States of America Patent
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Jun 15, 2010
Grant Date -
Feb 28, 2008
app pub date -
Jun 19, 2006
filing date -
Jun 17, 2005
priority date (Note) -
Expired
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Abstract
or higher, the p-type semiconductor and the n-type semiconductor are joined together, the heating section is energized parallel to the junction surface and directly heated by a pair of current introducing terminals, and some of the introduced electrons are emitted from the electron emitting portion.
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