METHOD OF RECYCLING WASTE WATER AND APPARATUS FOR PERFORMING THE SAME
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United States of America Patent
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Issued Date -
Feb 28, 2008
app pub date -
Aug 16, 2007
filing date -
Aug 24, 2006
priority date (Note) -
Abandoned
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Abstract
A method of recycling waste water is preferably provided in which hardness and gas are removed from the waste water. Additionally, salt and organic carbon are preferably removed from the waste water using high-efficiency reverse osmosis. The pH of the waste water can be controlled to optimize the processes. The recycled semiconductor waste water can then be made available for use as industrial water for performing a semiconductor fabrication process. As a result, a cost for manufacturing a semiconductor device may be reduced. The principles of the present invention also provide a more environmentally friendly manufacturing method, since it produces less semiconductor waste water when being performed than conventional methods.
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