MEMS SWITCH
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Feb 28, 2008
app pub date -
Jul 18, 2007
filing date -
Aug 25, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Abstract
A Micro-Electro-Mechanical System (MEMS) switch includes: a substrate; a fixed electrode provided on the substrate; and a beam fixed to the substrate and including a movable electrode disposed to face the fixed electrode. The beam is capable of being bent and displaced in a direction of the substrate to allow the movable electrode to directly contact with the fixed electrode. At least one of the fixed electrode and the movable electrode contains Au, and the other contains at least one metal selected from a group consisting of Ir, Rh, Os, Ru, Re and Te as a main component.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
KABUSHIKI KAISHA TOSHIBA | 1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-0023 |
International Classification(s)

- 2007 Application Filing Year
- B81B Class
- 42 Applications Filed
- 11 Patents Issued To-Date
- 26.20 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kawakubo, Takashi | Yokohama-shi, JP | 82 | 2110 |
# of filed Patents : 82 Total Citations : 2110 | |||
Nagano, Toshihiko | Kawasaki-shi, JP | 43 | 837 |
# of filed Patents : 43 Total Citations : 837 | |||
Nishigaki, Michihiko | Kawasaki-shi, JP | 60 | 802 |
# of filed Patents : 60 Total Citations : 802 |
Cited Art Landscape
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Patent Citation Ranking
- 2 Citation Count
- B81B Class
- 50 % this patent is cited more than
- 17 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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