MEMS SWITCH

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20080047816A1
SERIAL NO

11779367

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A Micro-Electro-Mechanical System (MEMS) switch includes: a substrate; a fixed electrode provided on the substrate; and a beam fixed to the substrate and including a movable electrode disposed to face the fixed electrode. The beam is capable of being bent and displaced in a direction of the substrate to allow the movable electrode to directly contact with the fixed electrode. At least one of the fixed electrode and the movable electrode contains Au, and the other contains at least one metal selected from a group consisting of Ir, Rh, Os, Ru, Re and Te as a main component.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBA1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-0023

International Classification(s)

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  • 2007 Application Filing Year
  • B81B Class
  • 42 Applications Filed
  • 11 Patents Issued To-Date
  • 26.20 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2007200820092010201120122013201420150255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawakubo, Takashi Yokohama-shi, JP 82 2110
Nagano, Toshihiko Kawasaki-shi, JP 43 837
Nishigaki, Michihiko Kawasaki-shi, JP 60 802

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Patent Citation Ranking

  • 2 Citation Count
  • B81B Class
  • 50 % this patent is cited more than
  • 17 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1151 - 6061 - 7000.050.10.150.20.250.30.350.40.450.50.550.60.650.70.750.80.850.90.9511.05

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