Excimer laser device
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United States of America Patent
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Issued Date -
Feb 14, 2008
app pub date -
Aug 7, 2007
filing date -
Aug 9, 2006
priority date (Note) -
Abandoned
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Abstract
An excimer laser device capable of suppressing deterioration of optical elements provided in a laser chamber even if output energy per pulse is increased more than the conventional level, in which a width of a laser beam applied to the optical elements provided in the laser chamber is enlarged so as to reduce the energy density of the laser beam within such a range that a laser output of no less than a desired level is obtained.
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