Variable shape mirror
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United States of America Patent
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N/A
Issued Date -
Feb 14, 2008
app pub date -
Aug 8, 2007
filing date -
Aug 9, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A variable shape mirror includes a support substrate, a mirror substrate that is opposed to the support substrate, a fixing member that is disposed on the support substrate and fixes the mirror substrate, and a piezoelectric element that is disposed on the support substrate and is expanded or contracted so as to deform a reflection plane of the mirror substrate. A bonding layer for bonding the mirror substrate and the fixing member to each other is provided to the surface of the mirror substrate opposite to the surface on which the reflection plane is formed, and the bonding layer is formed in an area that corresponds to the outside of an incident area of a light beam that enters the reflection plane.
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