Microconnector and manufacturing method of socket therefor
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United States of America Patent
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app pub date -
Apr 13, 2007
filing date -
Jan 27, 2003
priority date (Note) -
Abandoned
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Abstract
A microconnector in which elastic contact force is improved and a manufacturing method of a socket therefore, are provided. The microconnector includes: the socket 10 in which plural cantilever terminal blocks 14 having pressure receiving parts 16 are integrally formed on a board 11 made of single crystal silicon, and socket leads 15 are disposed on the terminal blocks 14; and a plug 20 in which plug leads 21 corresponding to the socket leads 15 are provided on a plug board 23. The manufacturing method of the socket 10 includes: a step of applying a resist to one surface of the board 11; a step of patterning the terminal blocks 14 by photolithography; a step of performing anisotropic etching to form the terminal blocks 14 to predetermined heights while a bottom is made to remain; a step of applying a resist to the other surface of the board 11; a step of patterning the pressure receiving parts 16 by photolithography; and a step of performing isotropic etching to remove the bottom.
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