Semiconductor manufacturing device and method
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United States of America Patent
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N/A
Issued Date -
Jan 31, 2008
app pub date -
Jul 26, 2006
filing date -
Jul 26, 2006
priority date (Note) -
Abandoned
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Abstract
A semiconductor manufacturing device and a method thereof capable of processing semiconductor substrates having a large diameter in a state that the semiconductor substrates keep standing and are opposed to each other are disclosed. The semiconductor manufacturing device includes a reaction chamber for providing an airtight process space; a boat including a pair of susceptors as the processing device mounted to the reaction chamber; a driving device for rotating the susceptors; a heater; a loading device for inserting the heater into an inner space of the susceptors; a supply nozzle and an exhaust nozzle; and a lifting device for inserting the exhaust nozzle into the space between the holders. The semiconductor manufacturing device according to present invention can prevent the transformation of the semiconductor substrate and the contamination owing to the minute dust and maintain the uniform temperature gradient of the semiconductor substrate.
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