Window assembly for a gas discharge laser chamber

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20080013589A1
SERIAL NO

11488879

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A window assembly for a pressurized laser discharge chamber is disclosed and may include a housing that is formed with a recess. The assembly may also include an optic having a first side that is exposed to chamber pressure and an opposed second side, and a compliant member that may be positioned in the recess to space the second side of the optic from the housing under normal chamber operating pressures. For the assembly, the compliant member may be compressible to allow the optic to mechanically abut the assembly housing during a chamber overpressure.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLC17075 THORNMINT COURT SAN DIEGO CA 92127

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Howey, James K Vista, CA 17 362
Melchior, John T San Diego, CA 14 443
Ujazdowski, Richard C Poway, CA 43 1432

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