Substrate transfer apparatus and substrate processing system using the same
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United States of America Patent
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N/A
Issued Date -
Jan 10, 2008
app pub date -
Jan 19, 2007
filing date -
Jul 4, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A substrate transfer apparatus includes first and second blades configured for supporting a substrate at different heights, respectively; an arm part connected to the first and second blades to move the first and second blades; and a drive unit configured for driving the first and second blades and the arm part, wherein the first and second blades are folded or unfolded while revolving on the same (single) axis of the arm part. According to the substrate transfer apparatus, a substrate processing throughput increases relative to a system area and time required for transferring and processing a substrate is reduced.
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