APPARATUS AND METHOD OF TRANSPORTING AND LOADING PROBE DEVICES OF A METROLOGY INSTRUMENT
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United States of America Patent
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Issued Date -
Jan 10, 2008
app pub date -
Jun 26, 2006
filing date -
Jun 26, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The preferred embodiments are directed to a probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices.
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