Electrolyte retaining on a rotating platen by directional air flow

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20070295610A1
SERIAL NO

11475637

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Abstract

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A method and apparatus for retaining electrolyte on a rotating platen using directional air flow is provided. In one embodiment, an apparatus for processing a substrate is provided. The apparatus includes a platen assembly having a surface for supporting a processing pad and disposed on a stationary base so that the platen assembly may rotate relative to the base; and an air knife coupled to the base and extended over a portion of the surface, the air knife operable to deliver a stream of air toward the pad to divert at least a portion of a fluid disposed on the pad toward a center of the pad.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Hung Chih Santa Clara, CA 139 1868
Mavliev, Rashid A Campbell, CA 15 196

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