FIXING BOARD AND POLISHING DEVICE USING THE SAME
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United States of America Patent
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Issued Date -
Dec 20, 2007
app pub date -
Jun 20, 2007
filing date -
Jun 20, 2006
priority date (Note) -
Abandoned
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Abstract
A fixing board and a polishing device using the same are provided. The fixing board attached to the non-semiconductor substrate includes a soft film and several films. The films are disposed on part of the soft film and substantially corresponding to a first surface of the non-semiconductor substrate.
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