Portable Microwave Plasma Systems Including A Supply Line For Gas And Microwave
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United States of America Patent
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app pub date -
Aug 11, 2005
filing date -
Sep 1, 2004
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Abstract
A portable microwave plasma system (10) includes a microwave supply unit (22), a waveguide-to-coax adapter (18) and a waveguide (20) that interconnects the microwave supply unit (22) with the waveguide-to-coax adapter (18), a portable discharge unit (12) and a supply line (16). The supply line (16) includes at least one gas line (62) and a microwave coaxial cable (64). The portable discharge unit (12) includes: a gas flow tube (42) coupled to the supply line (16) to receive gas flow; and a rod-shaped conductor (44) that is axially disposed in the gas flow tube (42) and has an end configured to receive microwaves from the microwave coaxial cable (64) and a tip (46) positioned adjacent the outlet portion of the gas flow tube (42). The tip (46) is configured to focus microwave traveling through the rod-shaped conductor (44) and generate plasma from the gas flow.
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