Non-Contact Transport Apparatus
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United States of America Patent
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Issued Date -
Dec 20, 2007
app pub date -
May 29, 2007
filing date -
Jun 2, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A non-contact transport apparatus comprises a top plate with a supply port for supplying air thereto, a diffuser plate having a plurality of discharge holes for discharging air, and a sheet-shaped nozzle plate interposed between the top plate and the diffuser plate and having a plurality of nozzles therein. The top plate, the nozzle plate and the diffuser plate are stacked and integrally connected to one another through a plurality of connecting bolts. Air is supplied from the supply port and via flow passages to the plurality of nozzles. Air is directed to the outside from the plurality of discharge holes, via radially formed nozzles oriented in a radially outward direction.
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