Vacuum ion-getter pump with cryogenically cooled cathode
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United States of America Patent
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Issued Date -
Dec 13, 2007
app pub date -
Jun 12, 2006
filing date -
Jun 12, 2006
priority date (Note) -
Abandoned
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Abstract
A vacuum ion-getter pump includes a vacuum chamber having a pumping port, an anode positioned in the vacuum chamber, a cathode positioned in the vacuum chamber in proximity to the anode, a voltage source coupled between the anode and the cathode, a magnet assembly to produce a magnetic field in the vacuum chamber, and a cooling device thermally coupled to the cathode. The cooling device may be a cryogenic cooling device.
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