Device and method to create a low divergence, high power laser beam for material processing applications
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United States of America Patent
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Issued Date -
Dec 6, 2007
app pub date -
Jun 5, 2006
filing date -
Jun 5, 2006
priority date (Note) -
Abandoned
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Abstract
A thin beam laser crystallization apparatus for selectively melting a film deposited on a substrate is disclosed having a laser source producing a pulsed laser output beam, the source having an oscillator comprising a convex reflector and a plano output coupler; and an optical arrangement focusing the beam in a first axis and spatially expanding the beam in a second axis to produce a line beam for interaction with the film.
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